INFICON IC6 Thin Film Deposition Controller - Manual (Page 255)

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IC6 Operating Manual
12.6 Determining Cross Talk Calibration
For Co-Deposition
The automatic Cross Talk Calibration feature of the IC6 is beneficial to applications
involving the simultaneous deposition of two materials. When depositing two
materials, it is not always possible to isolate each crystal so that it samples material
from a single source. The Cross Talk Calibration feature is used to eliminate
interference from the second source's material being deposited onto sensors
intended to control the deposition rate from the first source.
Calibration Thickness (CalThickness) values must be determined for each sensor,
and for each material used in the co-deposition, otherwise a co-deposition
uncalibrated message will be displayed. The Process cannot be STARTed until the
Cal Thickness values are entered. These values may be manually entered on the
Sensor page of the Material display or may be automatically calculated using the
Cross Talk Calibration series of displays. If Automatic Cross Talk Calibration is
chosen, the Cal Thickness values calculated will be displayed on the Material
Sensor page.
The Cal Thickness values are then used to calculate the percent cross talk (Cross
Talk ) values shown on the Layer definition display. EVERY sensor used on BOTH
materials of a codeposition MUST be calibrated for each material.
The general expression for computation of Cross Talk is by the following:
Example: Materials A and B are to be co-deposited
Material A uses Sensors 1, 2 and 3 which control the aggregate rate for Source 1.
Material B uses Sensors 4, 5 and 6 which control the aggregate rate for Source 2.
Enter CAL Thick values for Material A (either automatically or manually):
Sens 1 Sens 2 Sens 3 Sens 4 Sens 5 Sens 6
CAL Thick 2.500 kA 2.200 kA 0.200 kA 1.000 kA 0.900 kA 0.100 kA
The percent Cross Talk for the Layer having Material A is:
[6]
Enter CAL Thick values for material B (either automatically or manually)
Sens 1 Sens 2 Sens 3 Sens 4 Sens 5 Sens 6
CAL Thick 0.100 kA 0.150 kA 0.125 kA 2.125 kA 0.125 kA 0.100
The percent Cross Talk for the Layer having Material B is:
[7]
CAL Thick Sens 4 CALThick Sens 5 CALThick Sens 6 + +
3
------------------------------------------------------------------------------------------------------------------------------------------------
 
 
CALThick Sens 1 CALThick Sens 2 CALThick Sens 3 + +
3
----------------------------------------------------------------------------------------------------------------------------------------------
 
 
------------------------------------------------------------------------------------------------------------------------------------------------------ 100% 29.6 = 
CAL Thick Sens 1 CALThick Sens 2 CALThick Sens 3 + +
3
------------------------------------------------------------------------------------------------------------------------------------------------
 
 
CALThick Sens 4 CALThick Sens 5 CALThick Sens 6 + +
3
----------------------------------------------------------------------------------------------------------------------------------------------
 
 
------------------------------------------------------------------------------------------------------------------------------------------------------ 100% 16.0 = 