INFICON IC6 Thin Film Deposition Controller - Manual (Page 200)

10 - 30
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
50
(0x32)
Sensor 1
Failure Action
0/ 4/ 2
Encode
0 = Unused
1 = PostDp
2 = Stop
3 = Suspnd
4 = TimePw
Visible only if Multipoint is
set to Yes
At least one must be
non-zero (when multipoint
set to "Yes")
Update not allowed when
transfer or backup sensor
is running.
51
(0x33)
Sensor 2
Failure Action
0/ 4/ 0
52
(0x34)
Sensor 3
Failure Action
53
(0x35)
Sensor 4
Failure Action
54
(0x36)
Sensor 5
Failure Action
55
(0x37)
Sensor 6
Failure Action
56
(0x38)
Sensor 7
Failure Action
57
(0x39)
Sensor 8
Failure Action
58
(0x3a)
Sensor 1
Failure Trigger
0/ 1/ 1 Encode
0 = OnFail
1 = Last
Visible only if Multipoint is
set to Yes
Gray font if Failure
Action= 0 (Not Used)
Update not allowed when
transfer or backup sensor
is running.
59
(0x3b)
Sensor 2
Failure Trigger
60
(0x3c)
Sensor 3
Failure Trigger
61
(0x3d)
Sensor 4
Failure Trigger
62
(0x3e)
Sensor 5
Failure Trigger
63
(0x3f)
Sensor 6
Failure Trigger
64
(0x40)
Sensor 7
Failure Trigger
65
(0x41)
Sensor 8
Failure Trigger
Table 10-9 Material parameters (continued)
QM UM
Cmd ID Name
(Units)
Range:
Low Limit/
High Limit/
Default
Data Type Notes
Update Restrictions
and Display Notes