INFICON IC6 Thin Film Deposition Controller User Manual
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IC6 Operating Manual
Figure 3-20 Process state diagram
1
Make sure the IC6 is in READY. If not, press STOP then RESET.
2
Press START. Assuming there are no configuration problems, the layer to start
will enter pre-deposition, and continue on through deposition and
post-deposition. (See
for detailed information about
the states of a layer.) If there are configuration problems, a message describing
the problem will be displayed, see
for Status and Error Message
definitions.
3
When the first layer is complete, it will go to IDLE. Press START again to begin
the next layer unless Auto Start Next layer has been enabled. Repeat until the
process is complete.
4
If at some point there is a need to interrupt or discontinue the process, press
STOP. This will close the sensor and source shutters, set the power to zero,
and freeze the display. The process can be restarted where it left off by
pressing START. (The pre-deposition phases will be repeated.) To completely
abandon the run, press RESET.
5
A critical error may occur while a process is running.
For example, a sensor fail on a single crystal sensor head may occur during
pre-deposition. The IC6 will automatically follow Materials Failure Action if a
critical error occurs. See
section 15.1, Status Messages, on page 15-1
for a list
Normal
Sequence
Alternate
Sequence
Hand denotes key press
Key