INFICON IC6 Thin Film Deposition Controller User Manual
Page 219
10 - 49
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
28
(0x1c)
Default Process
<Process#>
<Byte>
# Range is 1 to 50
Removes all layers of the specified process.
29
(0x1d)
Soak Hold Pre Con
on <Material >
<Byte>
Material Range is 0 - 32 (0 = All Materials)
30
(0x1e)
Soak Hold Pre Con
off <Material >
<Byte>
31
(0x1f)
Start Inhibit On
Disallows a Start command to be executed.
32
(0x20
Start Inhibit Off
Allows a Start command to be executed.
33
(0x21)
RateWatcher
Sampling Inhibit On
<Material >
<Byte>
Will immediately cause the Deposit state to leave sampling and
not return until turned off.
34
(0x22)
RateWatcher
Sampling Inhibit Off
<Material >
<Byte>
Allows the Deposit state to go into the RateWatcher algorithm.
35
(0x23)
RateWatcher Sample
Initiate On <Material
>
<Byte>
Allows the Deposit state to enter RateWatcher sampling
36
(0x24)
RateWatcher Sample
Initiate Off <Material
>
<Byte>
Turns RateWatcher sampling off.
37
(0x25)
Clear Q and S counts
for sensor X
<Byte>
Clear Q and S counts for specified sensor X
38
(0x26)
Name Material
<Material><Library
Entry>
<Byte><Byte>
Give material number <Material> (1-32) the name
corresponding to material entry <Library Entry> (0-254). Library
entries range from 0 (Ag) to 254 (ZrO
2
), with numbers
correcponding to the alphabetical listing in the library. The
density and Z-Ratio will be changed accordingly.
Table 10-15 Remote general (continued)
RG
Command
ID
Meaning
Action Value
Notes