INFICON IC6 Thin Film Deposition Controller User Manual
Page 118
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IC6 Operating Manual
If the TOOLING parameter for a sensor is changed, the new TOOLING
value is used for subsequent calculations of the sensor rate, and
therefore the aggregate rate, if the sensor’s Failure Action is not
"Unused". Field will be inaccessible if unused (0) failure action.
NOTE: This parameter affects the aggregate rate calculation. The
aggregate thickness accumulated thus far is not re-scaled
based on the change to the TOOLING of a sensor. The
individual sensor’s accumulated thickness is also not
re-scaled.
XTALTWO TOOLING. . . . . . . . . 1.0 to 999.9%
This parameter applies only if the sensor type is XtalTwo (CrystalTwo). Sets
the Tooling factor when a dual sensor or two single sensors are connected
to the same sensor channel using a CrystalTwo switch. Default value is
100%.
If the sensor type is XtalSix (CrystalSix) or Xtal12 (Crystal12)
XTAL POSITION FIRST . . . 0 to 6 (12 for Xtal12)
XTAL POSITION LAST. . . . 0 to 6 (12 for Xtal12)
If all available positions are to be used for this material, set both values
to 0. Otherwise, enter values to select the set of positions to use for this
material. Permissible values for a CrystalSix are 0 to 6, 0 to 12 for a
Crystal12. Default is 0.
NOTE: If an out-of-range position condition results when a sensor type is
changed, the position values will be defaulted to 0.
MASTER TOOLING . . . . . . 1.0 to 999.9%
If Multipoint has been set to Yes, this affects all sensors. Tooling is a
correction factor used for correlating the (aggregate) rate and thickness
accumulation on the crystal with the thickness accumulation on the
substrate. This thickness difference is due to the geometric distribution
of material flux from the source.
The MASTER TOOLING factor is calculated using
.
[1]
where TF
i
= Initial Tooling Factor, T
m
= Actual Thickness at the
Substrate, and T
x
= Thickness on the Crystal.
The default value is 100%.
TOOLING
TF
i
T
m
T
x
=