INFICON IC6 Thin Film Deposition Controller User Manual

Page 136

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IC6 Operating Manual

LAYER TO START. . . . . . . . . . . . . . 1 to 200

This selects the starting Layer from the sequence of Layers defined in the
Active Process. The upper limit to the range of values is determined by the
number of Layers defined for a given Process. This value cannot be changed
while executing a process. Default value is 1.

SOURCE DAC REQUIRED . . . . . . . Yes (1), No (0)

The value in parentheses is used for the remote communications commands.
Default is Yes for normal deposition processes and enables error checking.
When a Start is initiated with DAC Output 0 assigned to an active source, an
error message will be displayed.

AUTO START NEXT . . . . . . . . . . . . Yes (1), No (0)

Yes enables automatically starting the next layer in the process when the
previous layer reaches the Idle state, unless that layer is the last layer in the
process. Default is No.

NOTE: If Auto Start Next is Yes, the following logic statements will be triggered

only at the end of the process (not at the end of each layer):

Idle

Layer End

Material End

Post Deposit, if there are no states between Deposit and Idle.

MAX CONCURRENT LAYER . . . . . 1 to 6

Prevents accidental double Starts which may cause the process to stop.
Default is 2.

LAYERS DISPLAYED . . . . . . . . . . . Auto (0), 4 (1), 6 (2)

Parameter is not accessible if Max Concurrent Layer is set to 1 or 2. Default is
Auto. Determines the number of layers shown simultaneously on the Operate
display.

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