INFICON IC6 Thin Film Deposition Controller - Manual (Page 167)

9 - 19
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
TRIG FNL THICK ## . . . . . . . . . . . . 0 (any material) to 32
This action triggers Final Thickness for the designated Material ## and the layer
proceeds to the Feed Ramp or Idle Ramp state. This action is ignored if not in
the Deposit state.
XTL FL INHB # . . . . . . . . . . . . . . . . ON/OFF 0 (any sensor) to 8
When set to On, this action prohibits the Crystal Fail logic event from becoming
active for the designated sensor number, but has no effect on crystal switching
or sensor failure action. This is useful when changing crystals. Commands from
Remote Comm and Logic will be independent.
ZERO DEPOSIT TIME ## . . . . . . . . 0 (any material) to 32
This action will zero the Layer Deposit time for the designated Material ## being
deposited. If two or more materials are in deposit simultaneously, the time will
zero for all materials. If an output is triggered on a Time Limit, the output will
remain triggered even after resetting the Layer Time
ZERO THICK ## . . . . . . . . . . . . . . . 0 (any material) to 32
This action is identical to selecting the ZERO THICKNESS panel function key
in the OPERATE display. The Action will zero the thickness accumulated on the
display for the designated Material ## being deposited, and will also zero each
of the sensor thicknesses in use for this layer.