INFICON IC6 Thin Film Deposition Controller - Manual (Page 271)

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IC6 Operating Manual
Chapter 15
Troubleshooting, Status and Error Messages
15.1 Status Messages
Some IC6 status messages will have designators to indicate the Material, Source
or Sensor the status refers.
Table 15-1 indicates designators and to what they
refer. If there is a message that has multiple occurrences, it will display on one line
with multiple designators after it.
There are a few status messages that have a designated area in the status
message area. These messages are noted in
Table 15-1 .
Table 15-1 Status messages
Status Message Set Cleared Screen Remote
Comm.
Encode
Crystal Fail X…X One or more of the sensors
that are called out in currently
active layers fails to measure a
crystal.
X = Sensor When all sensors in use are
good.
When any sensor in use is
good the sensor number clears
from the numeric list. All
Designated area
0x8000,0000
0000,0000
Max Power X…X Whenever the source power
reaches the maximum power
programmed for an active
layer. X = Material number Whenever the source power is
reduced from the maximum
power for an active layer. All
Note: This
message will
display in the
cause of stop
area whenever it
is TRUE.
Designated area 0x4000,0000
0000,0000
Test The general parameter Test
has been set to Yes The general parameter Test
has been set to No All.
Designated area 0x2000,0000
0000,0000
A TEST The general parameter
Advanced Test has been set to
yes. The general parameter
Advanced Test has been set to
No. All.
Designated area 0x1000,0000
0000,0000
R Lock A command was received via
remote communications to lock
the IC6.
NOTE: R Lock supercedes
L Lock) A command was received via
remote communications to
unlock the IC6. All
Designated area
0x0800,0000
0000,0000
L Lock A lock code has been
programmed via the keyboard
and the lock has been set.
NOTE: R Lock supercedes
L Lock) The lock code has been
entered via the keyboard to
unlock the IC6. All
Designated area
0x0400,0000
0000,0000