Caution – INFICON IC6 Thin Film Deposition Controller User Manual

Page 107

Advertising
background image

4 - 7

PN

07

4-

50

5-

P1

F

IC6 Operating Manual

TURRET INPUT . . . . . . . . . . . . . . . . 0 to 28

This parameter designates which of the 28 inputs is to be the Turret Feedback
input. Values range from 0 to 28. Values 1 through 14 correspond to the
appropriate input on I/O Relay Module 1, values 15 to 28 require the I/O Relay
Module 2. Value 0 indicates that an input for turret feedback is not used. The
default value is 0. However, an input must be assigned or the process will never
proceed past the source switching state of the process. If a value other than 0
is entered, the input chosen as the Turret Input is designated as such on the
Digital I/O display. Input lines are activated with a contact closure to ground.

TURRET DELAY . . . . . . . . . . . . . . . 2 to 180 s

The Turret Delay time sets the maximum amount of time the Process will
remain in CRUCIBLE SW(itch), waiting for rotation to complete without turret
feedback before proceeding to the pre-condition state. If a Turret Input signal
is expected (Turret Feedback = Yes) this is the time the IC6 will wait to receive
the input signal. If the signal is not received within this time, the IC6 will stop. If
the Turret Input becomes active during the delay time, processing continues
immediately. Permissible values are 2 to 180 seconds. The default value is 5
seconds.

CAUTION

The IC6 will proceed to the Pre-Condition state after the
Turret Delay time expires. This could result in damage to
your equipment if the crucible is not in position after
expiration of the Turret Delay time.

Advertising