INFICON IC6 Thin Film Deposition Controller - Manual (Page 114)

5 - 6
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
MINIMUM POWER . . . . . . . . . . . . . 0.00 to 99.98%
This parameter is used to set the minimum permissible % power level. The
control voltage output will not exceed this limit. The default value is 0.00%.
RECORDER OUTPUT. . . . . . . . . . . 0 to 12
There are twelve (six standard, six optional) DAC outputs available which may
be divided among source control voltage outputs, individual sensor
rate/thickness recorder outputs, aggregate rate/thickness or power level
recorder outputs. A value of zero indicates there is not a recorder output
chosen for that function. Values 1 through 6 correspond to the six DAC BNC
outputs on the back of the IC6 labeled DAC 1 to DAC 6. DAC outputs 7 to 12
require the optional DAC outputs card. The default value is zero for the Rate
filtered for the Rate Filter Time, see
section 5.1.7 on page 5-16 .
RECORDER FUNCTION . . . . . . (Filtered) Rate (0), Thick(ness) (1),
RateDev(iation)(2), Power (3). Default is
Zero.
RECORDER RANGE. . . . . . . . . 0 to 99999
Selects the full scale value in the appropriate units, Å/s for Rate and Å for
Thickness. Default value is 100. Full scale values are fixed at +/- 50 Å/s for Rate
Deviation, depending on what was selected on the Operate screen and 100%
for Power.
5.1.4 Material Screen Sensor Parameters Page
MATERIAL NUMBER . . . . . . . . . . . 1 to 32
Change the number to edit or create a different material.
MULTIPOINT . . . . . . . . . . . . . . . . . . No (0), Yes (1)
Enables averaging of multiple sensors if set to Yes (1). Default is No (0). Up to
eight sensors may be used to control an “aggregate” rate. The aggregate rate
is determined from averaged rate information at each sensor scaled by the
sensor tooling and sensor weight parameters. The standard IC6 includes
sensor channels 1 and 2. The IC6 will support six additional sensor channels
with the addition of optional measurement cards.
When Multipoint is set to No (0)
The following parameters are displayed only when the Multipoint parameter
is set to the default value of No (0).
SENSOR . . . . . . . . . . . . . . 1 to 8
Select the sensor to use for this material. This parameter only appears
if Multipoint has been set to No.