INFICON IC6 Thin Film Deposition Controller User Manual
Page 52
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2 - 10
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
Table 2-3 Input/Relay pin connections
I/O Board #1
I/O Board #2
Relay #
Pins
TTL
Input #
Pin
Relay #
Pins
TTL
Input #
Pin
1
7, 6
1
15
9
7, 6
15
15
2
9, 8
2
14
10
9, 8
16
14
3
11, 10
3
13
11
11, 10
17
13
4
13, 12
4
12
12
13, 12
18
12
5
5, 4
5
11
13
5, 4
19
11
6
3, 2
6
10
14
3, 2
20
10
7
1, 14
7
9
15
1, 14
21
9
8
15, 16
8
8
16
15, 16
22
8
9
7
23
7
10
6
24
6
11
5
25
5
12
4
26
4
13
3
27
3
14
2
28
2
GND
1
GND
1
I/O Board #3
Relay #
Pins
TTL
Output #
Pin
17
7, 6
25
9
18
9, 8
26
10
19
11, 10
27
11
20
13, 12
28
12
21
5, 4
29
13
22
3, 2
30
14
23
1, 14
31
15
24
15, 16
32
1
33
2
34
3
35
4
36
5
37
6
38
7
GND
8
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