INFICON IC6 Thin Film Deposition Controller - Manual (Page 90)

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IC6 Operating Manual
Power-up initialization is performed on a dual sensor to verify that the back-up
crystal is good.
If a crystal fail occurs while in Deposit, the IC6 will switch to the second crystal and
continue. The Failed Crystal list can be cleared while in Deposit by pressing the F4
function key on the Sensor Information screen with the cursor positioned on the
appropriate sensor number. The IC6 will run the next layer using the last crystal
position it switched to. While in Ready, the Failed Crystal list can also be cleared
by executing a crystal switch with the Hand held controller or by pressing the
Switch Crystal function key in the Sensor Information screen or via
communications command RG23 (Switch Sensor) see
section 10.4.33, Remote
General Action, on page 10-47 . A good crystal must be available to switch to in the
case of using the crystal switch method.
3.6.1.2 XtalSix (CrystalSix)
On power-up, all crystals are read to determine how many good and bad crystals
are present. The IC6 uniquely identifies and tracks all six positions in the
CrystalSix.
During deposition, when there is a crystal failure the IC6 will automatically switch
to the next position with a good crystal. When the last good crystal fails and a
backup sensor is not available, the Xtal Fail message is displayed, the Xtal Fail
state becomes true and the IC6 will go directly to Time Power, POST DEP,
SUSPEND or STOP, as appropriate.
When the sensor selected is a XtalSix, the relay contacts are pulsed closed for one
second, opened for one second, closed for one second, then opened for each
position. The first one second closure will advance the CrystalSix carousel into an
intermediate position between two crystals. Opening the closure for one second
allows the ratchet mechanism to relax whereupon the second contact closure
advances the next crystal into the proper position.
3.6.1.3 Xtal12 (Crystal12)
On power-up, IC6 will rotate the sensor until position 1 is detected. It will continue
to rotate through the other 11 positions to determine the state of all crystals. At the
conclusion of the sequence, the Sensor Information screen shows the sensor in
position 1 and the position number of any failed crystals. The Crystal12 has
resistors electrically in parallel for each of the 12 positions. The IC6 verifies that the
resistance value is correct at each position. If the value is not as expected, the IC6
pulses again and rechecks the position. If position 1 is not detected, or after 13
pulses of the wrong value, the IC6 reports a Crystal Sw Fail message. In that case,
all crystals are also marked as failed, except for current position status.
When the carousel is removed from the sensor for crystal replacements, the IC6
will display Carousel Open. This message also appears if the connection between
the XIU (oscillator) and the sensor is absent. After the carousel is replaced, the IC6
assumes the current position is 12 and all crystals are failed. A Crystal Switch or