INFICON IC6 Thin Film Deposition Controller - Manual (Page 195)

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PN
07
4-
50
5-
P1
F
IC6 Operating Manual
Increment Count XXX
Counter # 1 20
0x4F
Clear Counter XXX 0x50
Start Timer XXX
Timer # 1 20
0x51
Cancel Timer XXX 0x52
Switch Xtal XXX Sensor # 1 8 0x53
* PreCond S/H Off XXX
Material # 0 32
0x54
* PreCond S/H On XXX 0x55
* Soak 1 Hold Off XXX
Material # 0 32
0x56
* Soak 1 Hold On XXX 0x57
* Soak 2 Hold Off XXX 0x58
* Soak 2 Hold On XXX 0x59
* Clock Hold Off 0x5A
* Clock Hold On 0x5B
* Start Inhbt Off ** 0x5C
* Start Inhbt On ** 0x5D
* Xtl Fl Inhbt Off
Sensor # 0 8
0x5E
* Xtl Fl Inhibt On 0x5F
* RWS Inhibit Off XXX
(RWS = RateWatcher Sample)
Material # 0 32
0x60
* RWS Inhibit On XXX 0x61
* RWS Init(iate) Off XXX 0x62
* RWS Initiate On XXX 0x63
Message On XXX See Note 1
Message # 1 10
0x64
Message Off XXX See Note 1 0x65
Note: There are ten User Messages available for the user to construct.
These messages can be displayed and cleared via logic actions. User
Messages are constructed on the General page Message screen.
Note: * = Remote Comm and Logic will be independent. Methods used to
set action must be used to clear action.
** = Start Inhibit will carry through a power cycle
Table 10-8 Action list (continued)
Actions Numeric
(Byte)
Min Max Logic Code