INFICON IC6 Thin Film Deposition Controller - Manual (Page 129)

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IC6 Operating Manual
Chapter 6
Process Setup
6.1 Process Setup Introduction
The IC6 is capable of storing the descriptions and parameters for up to fifty
processes. Processes can consist of up to 200 sequential layers of materials. If
more layers are required, another process can be started automatically. A layer or
sequence of layers may be copied up to 199 times, provided the maximum number
of layers is not exceeded.
Process layer definition includes the specification of a previously defined material
(refer to
Chapter 5, Material Setup ), Final Thickness, Thickness Limit, and Crucible
Number. The co-deposition capability of the IC6 allows establishing material ratio
and cross-sensitivity relationships.
Processes are defined by sequencing layers. Layers must be defined sequentially
starting with Layer 1. Defined layers may be inserted, deleted or copied using the
layer editing feature. Layers may be copied to other processes.
Process Setup is initiated by moving the cursor to the Process heading on the Main
Menu and pressing MENU. This will invoke the Process screen (see
Figure 6-1 ).
Return to the Main Menu display by pressing MENU again.
6.2 Overview Page
Figure 6-1 Process screen overview page