INFICON IC6 Thin Film Deposition Controller - Manual (Page 91)

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IC6 Operating Manual
Rotate Sensor function must be initiated in the Sensor Information screen or via
Remote Communication to enable the IC6 to catalog the state of all crystals and to
return to position 1. This must also be done after the sensor type has been changed
to Xtal12. The Rotate Head function is permitted only if the IC6 is in Ready, Stop or
all active layers are in Idle or Suspend.
During deposition, the IC6 will automatically switch to the next position with a good
crystal when there is a crystal failure. When the last good crystal fails, and no
backup sensor is available, the Crystal Fail message is displayed, the Xtal Fail
state becomes true and the IC6 will go directly to Time Power or STOP, POST DEP,
SUSPEND, as appropriate.
When configured for a Xtal12, the relay contacts are only pulsed closed for one
second then opened again once for each position. There is no intermediate
position.
3.6.1.4 Generic Sensor Crystal Switching
Selecting Generic as the sensor type enables sequential crystal switching for the
# Positions selected (maximum of 12). Upon a crystal switch, the Switch Output will
first close for the Pulse On time and then open for the Pulse Off time. The setting
# Pulses determines how many On/Off pulse sequences will occur for each
movement to the next crystal position. The IC6 will not keep track of which position
the Generic Sensor is on nor will it keep track of which crystals are good and which
are failed. The Position Selection feature is not available for the Generic sensor.
After a crystal switch sequence, the IC6 will attempt to find the resonant frequency
for the crystal in this position. If the IC6 does not find a good resonant frequency
for this crystal, it will again pulse the Crystal Switch Output and attempt to find a
resonant frequency at the next position. The maximum number of attempts to find
a good resonant frequency is one less than the # Positions value. If a good
resonant frequency is not found after all attempts, the IC6 will enter the Time
Power, POST DEP, SUSPEND or STOP state depending on the Sensor / Option
Action chosen in the Material/Sensor display.
Start resets all crystal fail flags to good.
3.6.2 Source/Crucible Selection
The IC6 can control a source with up to 64 crucibles through up to six binary
encoded relays. This is configured by setting the Number Of Crucibles, Crucible
Outputs, Turret Feedback, Turret Input, and Turret Delay parameters on the
SOURCE page of the SOURCE screen. (See
section 4.2.2, Source Parameters,
on page 4-5 for details on programming the parameters associated with
source/crucible selection.)
To define which crucible to use for a layer, set the Cruc(ible) parameter on the
PROCESS/Layer screen. When the layer is started, if the current crucible position
is different from the one requested, the system’s turret controller will move the