5 transient messages, Section 15.5, Section – INFICON IC6 Thin Film Deposition Controller User Manual

Page 279

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IC6 Operating Manual

15.5 Transient Messages

Transient messages, see

Table 15-5

, are displayed as the condition happens. The

messages are removed from the screen on any key press or if another transient
message appears. Only one transient message will be displayed at a time. These
messages will appear on all screens. A single line is assigned in the message box.

Table 15-5 Transient messages

Transient Message

Set

Clear

Screen

Remote

Comm.

Encodes

Locks Cleared

Local Lock, Remote lock cleared on power
up.

The message is
removed from
the screen on
any key press or
if another
transient
message
appears

All

1

Already Switching

Crystal is already switching when a request
to switch the crystal is received.

2

Process Running

Can’t do some activities if a process is
running. These activities include: Layer
editing, used in the active process,
copying/defaulting a material, entering
source maintenance, running an RS232
test, running an XIU test and reading in a
configuration file.

3

Parameter Default

All parameters were set to their default
values on power up.

4

Process Variables
Default

All process variables were set to their
default values on power up. Process
variables include current rates,
thicknesses, processes, layers, crystals,
states and other information needed to
continue a process after a power loss.

5

Manual Not Allowed

Cannot enter manual state while in idle,
stop or suspend states, or while crystal
failed.

6

Empty Process

Cannot set a process to active if it is empty

Process General

7

No Good Xtal to switch There are no good crystals left in the

crystal list. Only when trying to switch
while the sensor is in use on an active
layer.

All

8

No Switch Output

No switch output defined for a crystal
switch.

All

9

No Switch Single

Cannot switch a single sensor.

All

10

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