INFICON IC6 Thin Film Deposition Controller - Manual (Page 257)

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IC6 Operating Manual
entering the partially completed results is given. Only the CONTINUE setting
on MAX POWER will allow the calibration to continue on reaching MAX
POWER.
4 When using a Dual Crystal Sensor it is important that the Crystal shutter be
removed during calibration so that material will deposit onto both crystals. An
alternative to removing the crystal shutter is to perform the calibration
procedure allowing only one of the crystals to receive material and then
manually entering this Cal Thickness Value for the secondary sensor. This
manual entry of the Cal Thickness value ignores the tooling difference between
the two crystal positions.
Cross Talk Calibration is accessed via the Main Menu / Maintenance display.
NOTE: In the figures following, only four sensors are used. Sensor 1 and 2 for
Material 1 and Sensor 3 and 4 for Material 2.
Figure 12-7 Cross talk overview
The default condition is Cross Talk Calibrate Disabled.
To enable Cross Talk Calibrate, move the cursor onto the Disabled box and press
TOGL, then ENTER. The parameter value should now show Enabled. To return to
the Main Menu display, disable the Cross Talk Calibrate function by setting it back
to Disabled.
With Cross Talk Calibrate Enabled, the appropriate parameters can be entered by
cursoring to them.