INFICON IC6 Thin Film Deposition Controller - Manual (Page 289)

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IC6 Operating Manual
15.7.2 Troubleshooting Transducers/Sensors
NOTE: Many sensor head problems may be diagnosed with a DVM (Digital Volt
Meter). Disconnect the short oscillator cable from the feedthrough and
measure the resistance from the center pin to ground. If the reading is less
than 1-2 megohms, the source of the leakage should be found and
corrected. Likewise, with the vacuum system open check for center
conductor continuity, a reading of more than 1 ohm from the feedthrough
to the transducer contact indicates a problem. Cleaning contacts or
replacing the in-vacuum cable may be required.
A somewhat more thorough diagnosis may be performed with the optional
Crystal Sensor Emulator, 760-601-G1. See
section 15.9 on page 15-31 for
a discussion of its use and diagnostic capabilities.
9 Crystal fail message is always
on a. XIU/oscillator not connected a. Verify proper sensor/oscillator
connections
b. XIU/oscillator malfunctioning b. If available, insert a known
working XIU/oscillator in place of
suspect one; if XIU/oscillator is
confirmed bad, contact
INFICON service department
c. Defective cable from
feedthrough to XIU/oscillator or
from IC6 to XIU/oscillator c. Use an ohm meter or DVM to
check electrical continuity or
isolation as appropriate
d. Poor electrical contact in the
transducer, feedthroughs, or
in-vacuum cable d. Use an ohm meter or DVM to
check electrical continuity or
isolation as appropriate
e. Failed crystal/no crystal e. Replace crystal/insert crystal
f. Two crystals placed into the
crystal holder f. Remove one of the crystals
g. Frequency of crystal out of
range g. Verify that the crystal
frequency is within the required
range, use INFICON crystals.
h. S & Q values exceed
programmed values h. Clear S & Q via Remote
Comm or Function Key F3 on
Sensor Information page,
see
Table 15-7 Troubleshooting the IC6 (continued)
SYMPTOM CAUSE REMEDY