INFICON IC6 Thin Film Deposition Controller - Manual (Page 296)

15 - 26
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
15.8.1 Front Load
Follow the procedure below to replace the crystal in the Front Load sensor: (see
Figure 15-1 )
1 Gripping the crystal holder with your fingers, pull it straight out of the sensor
body.
2 Gently pry the crystal retainer from the holder (or use the Crystal Snatcher; see
Figure 15-6 on page 15-30 ).
3 Turn the retainer over and the crystal will drop out.
4 Install a new crystal, with the patterned electrode face up.
5 Push the retainer back into the holder and replace the holder in the sensor
body.
Figure 15-1 Front load crystal sensor (exploded)
Front Load Crystal Holder
(IPN 750-172-G1)
Front Load Standard
Crystal Sensor Body
(IPN 750-207-G1)
Crystal (IPN 008-010-G10)
Fully Coated Face (Gold)
Finger Spring Contact
(IPN 750-171-P1)
Crystal Retainer
(IPN 007-023)
In-Vacuum Cable
To XIU
Water Tubes