INFICON IC6 Thin Film Deposition Controller - Manual (Page 160)

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IC6 Operating Manual
PRECOND SOAK
Sets the logic condition to be true at the beginning of the Precond Soak state.
The condition remains true until the Rise 1 or a subsequent non-zero state is
entered, or until a STOP/RESET sequence is executed.
NOTE: This state, PRECOND RISE, RISE 1 and SOAK 1 are skipped if the
same material was used in a previous layer and has a non-zero Idle
power. The next layer using this material will immediately proceed to
the Rise 2 state.
PRE-DEPOSIT
Sets the logic condition to be true at the beginning of the Ready, Source Switch,
Shutter Delay, PreCond, Rise 1, Rise 2, Soak 1, or Soak 2 state. The condition
remains true until the Deposit, Manual, or any Post-Deposit state is entered.
PROCESS ##
Sets the logic condition to be true when Process ## is designated as the Active
Process. The condition remains true until the Process number is changed.
Values for ## range from 1 to 50.
PROCESS END ##
Sets the logic condition to be true at the end of the specified process when Idle
is entered. The condition remains true until a START or a STOP/RESET
command is received. Numeric inputs range from 0 to 50, with 1 through 50
indicating the respective active process and 0 indicating any process.
RATE <0.1
This condition will evaluate true when the actual deposition rate is less than
0.1 Å/s for more than 5 seconds while in Deposit or Manual. The condition
remains true until the actual deposition rate is greater than 0.1 Å/s for
5 seconds or more, when the layer reaches Idle or on Stop/Reset.
RATE DEVIATION ERROR
This condition will evaluate true when the actual deposition rate differs from the
rate setpoint by the larger of 5% or 0.1 Å/s for more than 60 seconds or 20 times
the control loop time constant while in Deposit. The condition remains true until
the layer leaves deposit.
RATE RAMP 1
Sets the logic condition to be true at the beginning of Rate Ramp 1. The
condition remains true until the end of Rate Ramp 1. The condition is also
cleared when entering the Manual state, and when a STOP/RESET or a
STOP/START sequence is executed.