INFICON IC6 Thin Film Deposition Controller - Manual (Page 202)

10 - 32
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
82
(0x52)
Sensor 1 CrystalTwo
Tooling (%)
1.0/
999.9/
100.0
REAL_4X1
Visible only if Multipoint is
set to Yes
Gray if crystal type not
Crystal2.
83
(0x53)
Sensor 2 CrystalTwo
Tooling (%)
84
(0x54)
Sensor 3 CrystalTwo
Tooling (%)
85
(0x55)
Sensor 4 CrystalTwo
Tooling (%)
86
(0x56)
Sensor 5 CrystalTwo
Tooling (%)
87
(0x57)
Sensor 6 CrystalTwo
Tooling (%)
88
(0x58)
Sensor 7 CrystalTwo
Tooling (%)
89
(0x59)
Sensor 8 CrystalTwo
Tooling (%)
90
(0x5a)
Sensor 1 Cal
Thickness (KÅ)
0/
999.8/
999.9
REAL_
4F31
Value of 999.9 kÅ is
considered "Un-Calibrated"
91
(0x5b)
Sensor 2 Cal
Thickness (KÅ)
92
(0x5c)
Sensor 3 Cal
Thickness (KÅ)
93
(0x5d)
Sensor 4 Cal
Thickness (KÅ)
94
(0x5e)
Sensor 5 Cal
Thickness (KÅ)
95
(0x5f)
Sensor 6 Cal
Thickness (KÅ)
96
(0x60)
Sensor 7 Cal
Thickness (KÅ)
97
(0x61)
Sensor 8 Cal
Thickness (KÅ)
Table 10-9 Material parameters (continued)
QM UM
Cmd ID Name
(Units)
Range:
Low Limit/
High Limit/
Default
Data Type Notes
Update Restrictions
and Display Notes