INFICON IC6 Thin Film Deposition Controller - Manual (Page 242)

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IC6 Operating Manual
11.4.7 State Descriptions
(See section 3.5 on page 3-32 .)
11.4.7.1 NonDepCntl State
Once a layer reaches its Final Thickness and enters the NonDepCntl state,
Remote command (see chapter 10 in the IC6 manual)
RL 2 # zeroes the layer’s thickness and reenters deposit,
RL 0 # suspends the layer.
RL 4 # places the layer in the programmed PostDeposit state.
Logic statements (see chapter 9) can also be used to zero thickness, continue
deposit etc.
11.4.7.2 Suspend
Once a layer is suspended, it can only be restarted with a Start from the front panel,
RG 0 command or a logic statement. All suspended layers will be started together.
11.4.7.3 Idle
Once a layer is in Idle, it can only be restarted after all active layers reach Idle and
end-of-process.
THEN (Actions)
(see section 9.4 on page 9-16 )
Start # Start (starts the first layer in Ready and all layers in Stop or
Suspend) or
Start Deposit Material# or
Continue Deposit Material# ( both only from NonDep Cntl)
Stop #, Suspend Material#, (if not in Idle)
Stop All Stop
Reset #
Reset All Reset
Table 11-1 Logic functions table (continued)
Cygnus
# is Channel number
IC6