3 dac output selection rules – INFICON IC6 Thin Film Deposition Controller User Manual

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IC6 Operating Manual

4.3 DAC Output Selection Rules

The six standard DAC outputs, DAC1 to DAC 6, located on the back of the IC6 and
the six optional DAC outputs, DAC 7 to DAC 12, may be used for rate control or to
record rate, thickness and rate deviation. Since these outputs can be set up for
different functions, certain rules apply.

No DAC output can be set up as both a recorder output and a source output. If
this is attempted, an error message will be displayed.

A DAC output cannot be set up for more than one source. If this is attempted
the error message DAC Used Source # will be displayed.

A DAC output can be set up for more than one recorder output including any
combination of Aggregate Rate/Thickness or Sensor Rate/Thickness.

If a DAC output is set up for multiple recorder outputs that are required to be
operative at the same time, the error message Recorder Conflict will appear.
This is a non-fatal error (that is, it will not cause the IC6 to STOP) and the
message will remain until the conflict is resolved or a STOP takes place.

The priority of a recorder output that is in conflict is:

1

Aggregate Rate/Thickness on the Primary Layer (the first of two
co-deposited layers).

2

Aggregate Rate/Thickness on the Secondary Layer (the second of two
co-deposited layers).

3

Sensor Rate/Thickness on the Primary Layer (from sensors 1 to 8).

4

Sensor Rate/Thickness on the Secondary Layer (from sensors 1 to 8).

For a Sensor’s Recorder Output to be active it must be associated with an
active Material.

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