INFICON IC6 Thin Film Deposition Controller - Manual (Page 269)

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IC6 Operating Manual
14.4 Data Logs
NOTE: To prevent loss of data, do not allow the number of files on the USB storage
device to exceed 500.
Data log files will be sent to the USB port storage device when the USB Datalog
Format parameter located on the datalog page of the USB STORAGE screen is set
to either Page or Comma by using the TOGL key. Error message "USB Disk Error"
appears if datalogging is turned on and a USB flash drive is not present.
The LogOff setting turns off datalogging.
As the layers create the datalog file they will be sent to the IC6DLOG directory on
the storage device attached to the USB port. The files will be named PxxRyyy.IDL,
where xx is the process number and yyy is the run number. If a file with the same
name exists, the new data log information will be appended to the existing file. The
IC6 will use the .IDL extension to identify Datalog files. See
Figure 14-2 .
See section 3.6.10, Datalog, on page 3-43 for the details of the data log data.
Figure 14-2 Datalog files