INFICON IC6 Thin Film Deposition Controller - Manual (Page 155)

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IC6 Operating Manual
Material, Sensor, Source, Layer End, Material End, Crystal Fail, Crystal Switching,
Max Power, Min Power, Backup Sensor In Use, Crucible Switch Fail, Rate < 0.1,
Transfer Sensor In Use, Auto-Z Fail, Ion-Assist, and Rate Deviation Error.
There cannot be two consecutive ONs in a statement. A ON B ON C is not allowed.
A ON B and C ON D is acceptable.
Neither the event preceding nor the event following the ON can have a NOT
function or a parenthesis. For example ~A ON B or A ON ~B is not allowed. Neither
is A ON (B and C) or (A and B) ON C.
The ON connector always takes precedence over the AND and OR operators no
matter where it appears in the statement. For example, A AND B ON C will be
evaluated as A AND (B ON C) not as (A AND B) ON C.
9.3 IF Event Definitions
If two or more layers are active simultaneously, an Event condition is considered
TRUE if it is true for any layers (for example, if the first layer is in DEPOSIT and the
second layer is in PRE-DEPOSIT, both the DEPOSIT and the PRE-DEPOSIT
Events would be TRUE).
The presence (or absence) of an input’s leading edge detection on the transition
from high to low (or low to high) is used to evaluate the event condition. Inputs are
not re-evaluated if held level at either the high or low state.
IF events can be connected using logic connectors, refer to section 9.2.3, AND/OR
and ON Logic Connectors, on page 9-6 . IF events can be negated.
ACTIVITY < # ###
Sets the logic condition to be true whenever the Activity value ### on sensor #
is less than the value entered for ### for at least 5 seconds. The condition
remains true until the Activity value is greater than ### for at least 5 seconds.
The Activity value ### can be 1 to 999. Numeric inputs for sensor # range from
0 through 8 (0 for any sensor).
AUTO-Z FAIL #
Sets the logic condition to be true whenever an Auto-Z fail condition occurs on
sensor #. The condition remains true until the Auto-Z Fail condition is cleared.
Numeric inputs for sensor # range from 0 through 8 (0 for any sensor).
AUTO TUNE
Sets the logic condition to be true when AutoTune is started. The condition
remains true until AutoTune is completed, exited, or until an AutoTune Fail
condition occurs.