4 checkout gases, 1 universal checkout gas – INFICON 3000 Micro GC Gas Analyzer Operating Manual User Manual
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3000 Micro GC Operating Manual
11.4 Checkout Gases
11.4.1 Universal Checkout Gas
Universal Checkout Gas may be used during installation to verify the chemical
performance of 3000 Micro GC or GC module. See
for the component
concentrations.
NOTE: Do not use the Universal Checkout Gas as a calibration standard for
specific applications. Different applications have different calibration
requirements and must be calibrated by an application-specific calibration
standard gas.
Table 11-8 Checkout gases
Description
Part Number
Universal Checkout Gas Cylinder
5183-4810
NGA Checkout Gas Cylinder
5184-3556
RGA Checkout Gas Cylinder
5184-3558
Regulator for Checkout Gas Cylinders
5184-3559
Table 11-9 The universal checkout gas
Components
Concentration (Mole %)
helium
0.10%
neon
0.05%
hydrogen
0.10%
oxygen
0.05%
nitrogen
0.10%
methane
balance
ethane
0.05%
ethylene
0.05%
carbon dioxide
0.05%
carbon monoxide
0.10%
acetylene
0.05%
propane
0.05%
methyl acetylene
0.05%
n-butane
0.05%
n-hexane
0.05%
n-heptane
0.05%