INFICON 3000 Micro GC Gas Analyzer Operating Manual - Manual (Page 37)

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3000 Micro GC Operating Manual
3.3.2 Injector Flow Assembly
The injector flow assembly (see Figure 3-10 ) consists of:
 MEMS injector chip—micro-machined miniature chip that injects sample into
the GC column
 Injector Pilot Solenoid Valve—on/off valve that directs carrier gas to drive
diaphragm valves within the MEMS injector chip
 Electronic Pressure Control (EPC) Valve—regulates the column head
pressure
 Sample Manifold Plate—provides interface between the EPC valve and the
Injector Pilot Solenoid valve to the MEMS injector
Figure 3-10 Injector flow assembly