INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 100)

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STC-2000A DEPOSITION CONTROLLER
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Pressing the NEXT FILM key brings forth the numeric entry screen that is used to select the next active
film. BA
c K returns the previous screen and discards the entry, if any. ENT er accepts the digit[s] entered as
the next active film and returns to the previous screen.
If 14 were entered, upon return to the runtime screen, the message "Next Film: 14" would appear as shown
below.
Programming the unit for non-sequencing involves the same type of communications and I/O setups,
system configuration, and film parameter modifications.
Process programming does not exist for non-sequencing product use.
An added parameter is added to the film parameter list: Final Thick Limit.
The final thickness, no longer part of process programming, becomes a parameter.
SEQ: active film# is always selected by a process.
non-SEQ: active film# is selected in place of active process# (MAIN menu key label change is apparent
along with non-appearance of the REVIEW PROCESSES key). [See section 2.1]
The non-sequencing mode has only one inherent unspecified process and films are manually
selected to be active. Only the film selected as active will be run (Main Menu in non seq mode). An
active film can be edited (modified) while it is running but only in a limited manner. This prevents
potentially dangerous situations from occurring. The limitations, that is, the parameters that are not
changeable while a film is running include the following:
Film parameters: SS Map Select, Pocket Select, Etching Mode.
Map parameters: CH x Start Mode, Source full power, Source out channel, Indexer Sync Mode.
Min ~~~ XTALS [3 parameters] (evaluated at start only except for RE-VERIFY key usage).
Next Film #: key legend changes from NEXT FILM x to UNIT BUSY NA.
A seeming inconsistency can apparently arise when in the non-sequencing mode as the STC-
2000A can be started using the MANUAL key from the idle state or the ready state. The apparent
inconsistancy would be caused when a parameter, such as the SOURCE FULL POWER (SS MAP
REVIEW), is changed and started or restarted using the MANUAL key instead of the START key. The
MANUAL key, although legitamite to use, does not update [resync] parameters, some of which are
reflected directly or indirectly on the RUNTIME screen. Likewise, starting [restarting] and stopping using
the MANUAL key will not incorporate changes made unless the start key (or a system reset, or power on /
off cycle) has been employed. Using the MANUAL key alone continues with the initial parameter settings
and does not utilize the changes, if any, that are made. Otherwise, in other cases, an inhibited error message
appears when parameter updates are attempted during an unsafe period. Using the example case, SOURCE
FULL POWER (SS MAP REVIEW), the parameter could be changed from 10 volts full scale to 5 volts full
SECTION 3.XX page 100 of 292