INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 255)

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STC-2000A DEPOSITION CONTROLLER
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Description Query of free (unused) steps available indicates 250 are unused. This means none have
been used for any processes, therefore, no processes can be run at this time. Once a process sequence is
programmed, this number will be reduced to show the remaining free space.
Table 29.11: Group 12 Examples.
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Process Sequencing - Read, Write, Edit Processes
Process Sequencing - Read, Write, Edit Processes Group 13 --
Commands W-Z, a-d
Commands W, X, Y, Z, a, b, c, d
These Commands Read, Write, Or Edit The Process Sequencing Steps.
(W) - Erase Process Step
(X) - Insert Process Step
(Y) - Read Layer Mode Setting
(Z) - Set Layer Mode Setting
(a) - Read Layer Film Setting
(b) - Write Layer Film Setting
(c) - Read Layer Final Thickness Setting
(d) - Write Layer Final Thickness Setting
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Process Sequencing Read, Write, Edit Processes(W,X,Y,Z,a,b,c,d)
The W command requests that the designated step of the selected process be erased, and any steps
following will be compacted up.
The X command commands the STC-2000A to insert a new step into recipe, with the mode type as
specified. Defaults the new step’s film number to 1, and its final thickness limit to 0 Angstroms. After
insertion of a new step the film and thickness values can be changes with the ‘b’ & ‘d’ commands.
PROCID ranges 1..9 to select the process to insert the new step into. STEPID ranges from 1..99 and if it
exceeds the current length of the process it will be interpreted so as to add a new step at the end.
The Y command requests a readback of a process step’s mode setting. Returns a numeric value
corresponding to a mode per the chart below.
List of valid mode codes for a step:
0. MODE_end End of recipe, some earlier step last valid step, use ‘U’ command above.
1. MODE_auto Auto start, this step will run at the end of previous step automatically.
2. MODE_wait Wait at this step for a process.
3. MODE_skip Skip this step and advance to others, if any.
4. MODE_stop Stop the process run, prepare to reset again.
‘Z’ commands the STC-2000A to set process step’s mode to a new value. This command is
similar to the ‘X’ command except it changes mode of existing step rather than inserting a new one.
Changing mode to MODE_end truncates the rest of the process recipe, freeing up step memory to available
list (see ‘V’ command above).
The ‘a’ command requests a readback of a process step’s film number setting. Returns a numeric
value (1..99) identifying the film program which the process step will execute when active.
The ‘b’ command requests the STC-2000A to set a process step’s film selection to a new value.
The ‘c’ command requests a readback of a process step’s final thickness limit value setting. It returns a
numeric value (0-9999999 angstroms) for the current setting of the target process step.
SECTION 6.XX page 255 of 292