Stc-2000a deposition controller – INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual

Page 105

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background image

p

STC-2000A DEPOSITION CONTROLLER

y


press fixed MANUAL key for manual power adjustment using pendant





STO P

IN C

D EC

Figure- 14.9 Manual Power Control


When you leave the Manual Power Mode (by pressing the fixed MANUAL key again), the STC-

2000A will enter the DEPOSIT phase of the film in use. The control loop will be active at this point. If
the Thickness number is greater than the programmed Final Thickness value when you leave MANUAL,
the STC-2000A will go to the next process step.

[The push buttons on the pendent hand controller can be used for other functions when the STC-2000A is not

in the Manual Power Mode. By using the programmable I/O, these keys can control internal I/O events or output to
relays. One common use example is to assign one of these buttons as an I/O program input to manually trip the final
thickness limit. An example of using these buttons for these functions is given in Example 5 of Section 5 of this
manual.]

Manual Power Control (LCD keys)

If the pendent is missing or if the pendent's key functions have been re-programmed (reassigned
functionality) by an I/O program, there are available arrow keys that accomplish the identical functions.
These have already been discussed in section 3.0. To reiterate briefly, switching between DEPOSIT and
MANUAL can be accomplished on the Runtime screen, 1

st

, 2

nd

and 3

rd

STATUS screens. On the 2

nd

STATUS screen, two arrow keys appear when switching into MANUAL mode. Press the UP arrow key to
increase power % value. Press the DOWN arrow key to decrease power % value.

deposit

manual

SECTION 3.XX

page 105 of 292

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