INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 27)

p
STC-2000A DEPOSITION CONTROLLER
y
Density
Z Factor
Setpoint Limits
Rate Ramp Power/Time
Soak Power/Time
Deposit Rate Values
PID Loop
Max Power Values
Shutter Parameters
Rate Sampling Values
Film Fail Mode
Xtal Loop Stability/Quality
Xtal Life Bounds
Graph Plotting Values
Map Select
Pocket Select
(SEQuencing Mode)
Step# (or Layer#)
Source Power Options
Master Tooling
Xtals: Start, Backup, Active
Xtal Drop Filter Mask
Indexer
Channel X:
Start mode
Fail action
Backup List
Tooling
Mode: Skip, Stop, Auto, End, Wait
Film #
Thickness
-OR-
Implicit Process
(NON-SEQuencing Mode)
Film #
Weight
EtchingMode
The typical usage would not be much beyond the simplest case as described above. This would include
more films (implying more materials), multiple deposits of the same or different materials or more
processes. In addition, a multiple crystal head with an integral either/or shutter is sometimes used as an
input to 2 sensor inputs. Although these configurations represent most systems, the capabilities of the STC-
2000A are beyond these necessities.
[A multiple crystal head that is used as an input to a single sensor input is not
supported with this product (no switching with zeroing on a single input, etc.).
Examples of added usage complications would be using (or using more) digital inputs, relays, a second
crystal, a second sensor channel, external I/O voltages, strip chart recorders, communication terminals, e-
beam source indexer (model: SRT-400), etc.
A pendent is supplied for some remote front panel functions and manual mode usage. The pendent plugs
into the front panel of the STC-2000A and has a 6 foot coiled cord.
A sensor card has 2 identical sensor inputs and 2 identical analog outputs. The 2 analog outputs, in this
single sensor card system, are typically used as 1 control output voltage and 1 strip chart output voltage.
[For multiple sensor card useage, the Sycon STC-2002 can be used.] The strip chart recorder output can be
set up on either of the analog outputs but only one strip chart recorder function per system is
programmatically allowed. Each of the two analog outputs arrive at the external connector in 2 polarities:
isolated and a negative version of the isolated output. A less expensive non-isolated version of the card is
TBD? There is a slot for 1 sensor card only (1 sensor card is standard in the STC-2000A included parts).
Crystal sensor and control voltage output usage has been described above. If one of the analog outputs is
already programmed for strip chart recorder output, a software menu change can convert the strip chart
output into a second isolated control voltage output.
There is a group of 4 slots for either input cards and/or output cards (1 of each type in the first 2 slots are
standard in the STC-2000A). Input cards have 8 opto-coupled inputs. Output cards have 8 form C (SPDT)
relays. Inputs are typically used to trigger events at some meaningful point in the process or to indicate to
the system user that some point has been reached. Outputs (relays) are typically used to open/close
shutters on material sources and crystal sensors, but are also used to control many other valves, relays,
SECTION 2.XX page 27 of 292