INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual
Page 291
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STC-2000A
DEPOSITION CONTROLLER
y
date___-___-___
[copy this page to record map parameters]
Source Sensor Map Parameters for Map #________ in Film #_______ in Process #________:
Source Sensor Full Power Volts
2.5, 5, 10 full scale volts
Source Sensor Max Power Value 0.0% - 100.0%
Source Sensor Analog Output Chnl 1 – 2 Channel Selection
Master
Tooling
Value
10.0%
-
400.0%
Minimum Start Xtal Channels
1 – 2 minimum channels
Minimum Backup Xtal Channels 0 – 1 minimum channels
Minumum Active Xtal Channels
1 – 2 minimum channels
Xtal
Channel
Drop
Filter
NONE,
BALANCE
Indexer Synchronization Mode
NONE, DELAY, FEEDBACK
Indexer Synchronization Time
2 – 999 seconds
Channel 1 Start Mode
OFF, ACTIVE, STANDBY
Channel 1 Fail Action Mode
NONE, ABORT FILM
Channel 1 Backup List
X – XXXXXXXX
Channel
1
Tooling
Value
10.0%
-
400.0%
Channel
1
Weight 10.0%
-
400.0%
Channel 2 Start Mode
OFF, ACTIVE, STANDBY
Channel 2 Fail Action Mode
NONE, ABORT FILM
Channel 2 Backup List
X – XXXXXXXX
Channel
2
Tooling
Value
10.0%
-
400.0%
Channel
2
Weight 10.0%
-
400.0%
SECTION 12.XX
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