Sensor head installation, Stc-2000a deposition controller, Electrical connections and descriptions – INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual

Page 142: Figure- : 4.1 head mounting dimensions

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STC-2000A DEPOSITION CONTROLLER

y


Electrical Connections And Descriptions


SECTION 4.0

Sensor Head Installation




Following is a diagram of a typical evaporator installation. This diagram is repeated and described further
in Section 3 (see fig. 3.7).

CRYSTAL SENSOR

SHUTTER

DATA AQUISITION

COMPUTER

CHAMBER

DEPOSITION

SOURCE

OSCILLATOR

Memory Module

CHART RECORDER

WARNING

!

I/O 4 I/O 3 I/O 2 I/O 1

SENSOR

SOURCE

INPUTS / OUTPUTS

1

2

1
2

FUSE: 2 X 2.00 AMP

QUICK-ACTING (F) 250V

90-264 VAC, 50-60 Hz, 230 VA MAX

THE POWER CORD PROTECTIVE
GROUNDING CONDUCTOR MUST
BE CONNECTED TO GROUND, NO

USER SERVICEABLE PARTS
INSIDE. REFER SERVICING TO
QUALIFIED PERSONNEL

instruments

R

S
2
3

2

M

E

M




Sensor Installation

As a general rule the sensor head should not be installed closer than 10 inches to the evaporation

source. This minimum distance will generally provide adequate measurement sensitivity while reducing
the possibility of the source spattering small particles onto the sensor. Even small particles hitting the
crystal surface may cause the crystal to become unstable or stop oscillating completely.

The sensor should be shielded from the evaporant source by a shutter or other means when

evaporant material is being initially conditioned or outgassed.

Water Cooling

Microdot Coaxial Connector

#4-40 Tap -- 4 holes
Equally Spaced

on o0.731 B.C.

Figure- : 4.1 Head Mounting Dimensions.

SECTION 4.XX

page 142 of 292

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