INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 89)

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STC-2000A DEPOSITION CONTROLLER
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Process Start Mode Edit Key Descriptions
Mode Choice: End
The
End mode would terminate the process. It is always inserted as the last step of a process.
Caution
CAUTION If the END statement is entered in the middle of an existing process, all steps or
layers that originally followed will be deleted.
Mode Choice: Auto
If
AUTO is programmed to be the layer start mode, then this layer begins immediately upon
completion of the previous layer. If layer 1 has AUTO programmed as its start mode then the first
appropriate start command generated begins this layer. Key legend is AUT.
Note
Note The unit must be reset of any ERROR conditions, and not in the process RESTING
mode but in the PROCESS STOP phase before a start command will be accepted. The fixed START key is
also used to reset any process error conditions and initiate a process reset under some conditions. (See
Section 3.0, START process)
Mode Choice: Wait
If
WAIT is programmed to be the layer start mode, upon completion of the previous layer, the
STC-2000A enters a wait state. This is useful when some mechanical event such as rotation of a source
pocket, or some process change like gas composition occurs between layers. The appropriate start
command (START-Break Wait) breaks the wait state and starts the layer. The break-wait command can be
issued from either a Front Panel function, a remote input or through one of the computer interfaces. Key
legend is WAI.
Mode Choice: Skip
If
SKIP is entered as the start mode, the layer is skipped over (key legend is SKP).
Mode Choice: Stop
If
STOP is entered as the start mode, the process will continue until the stop is encountered. The
STOP is similar to an END with the exception that if it is installed in the middle of a process list, the steps
following are not erased.
The
SKIP and STOP mode are normally not used in a process recipe. They can be useful during
the development of a process or to recover a process which has been aborted. Key legend is STP.
INSERT and DELETE.
Two list editing choices also become available when the EDT (edit) key is pressed.
Mode Choice: INSERT
INSERT inserts a step in an existing list (key legend is INS) after the line with the cursor. [If
END is at line 1, cannot use INSERT. Use MODE to change END to another mode choice and END will
be auto advanced to position 2.]
SECTION 3.XX page 89 of 292