INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 42)

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STC-2000A DEPOSITION CONTROLLER
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When the STC-2000A sensor card control voltage output is connected to the evaporant power supply,
Review Source Sensor Map parameters need to be selected for a proper interface (
SOURCE OUT CHaNneL,
SOURCE FULL PoWeR, SOURCE MAX PoWeR ) and the Map itself needs to be selected by a Film parameter
(SS MAP SELECT). Following this, other power supply related parameters must also be contemplated.
Some thermal excitation alternatives include: electron beam: wire fed electron beam source, high vacuum
e-beam w/ small (~2cc) crucible, fixed pocket (large and small), rotary pocket indexers; resistive heater
sources: metal filament boats, coils, oxide crucibles (all for organic material deposition). Crucible
capacities can range from a fraction of a cc to over 500cc. The input control requirements of the high
current (or voltage) power supply should be found in the power supply documentation. Don't assume there
is a standard. With the STC-2000A control voltage output controlling the power supply for the thermal
sources described above (the 2
nd control output voltage used for power supply control is typically employed
for the recorder function), the film parameters effecting power (processes depend upon films) are:
Soak 1 Power level Value
0.0 to 100.0%
Power Ramp 1 Time (to pwr level) 0 to 99:59 MM:SS
Power Soak 1 Time (@ pwr level) 0 to 99:59 MM:SS
Soak 2 Power level Value
0.0 to 100.0%
Power Ramp 2 Time (to pwr level) 0 to 99:59 MM:SS
Power Soak 2 Time (@ pwr level) 0 to 99:59 MM:SS
Soak 3 Power level Value
0.0 to 100.0%
Power Ramp 3 Time (to pwr level) 0 to 99:59 MM:SS
Control Loop –P-roportional term 1 to 9999
Control Loop –I-ntegral term
0.0 to 99.9 sec
Control Loop –D-erivative term 0.0 to 99.9 sec
Max Power Limit 0.0 to 100.0%
These parameters are presented
here for the purpose of name
familiarization and categorization
of power related parameters
across menu and screen
boundaries.
Abort Max Power SW OFF/ON
Max Power Dwell 0:01-99:59 MM:SS
Control Loop Qual Limits 0 to 9
Plot Vert Scale Volts 1, 5, 10, 50, 100
⇐ Graphical display function
Plot Horiz Scale H 1 to 600 samples
⇐ Graphical display function
Data Plot Type Rate /Power /Rate Deviation
⇐ Graphical display function
Source Sensor Map Select 1 to 10 (Selects the Map that contains Source Sensor analog output parameters)
Etching Mode Off / On ( Rate Direction can be Positive or Negative)
The Power Related RunTime Screen parameters are:
(Crystal Quality Indicator Select) L/Q, Loop x, Qual xx
(Manual mode)
(fixed front panel key)
(Manual mode) (pendant arrow keys [increase / decrease power manually])
(Manual mode) (2
nd
STATUS screen arrows: [increase/decrease power manually])
(Manual mode) (2 nd STATUS screen: zero power key [LCD] on non-active channels)
(Manual mode) (3
rd
STATUS screen: zero thick key [LCD] no effect on material thickness)
(Manual mode) (3 rd STATUS screen: force fail key [LCD] fail/verify crystal channels)
The Power Related System Configuration values are: Menu path: Main/Executive menu/System Configuration]
Recorder Functions Rate, Rate Deviation, Power, Thickness, Computer Remote, I/O, Off
Recorder Analog Output ChaNneL 2 Channels (select 1 only) [note possible conflict w/ Source Analog Output]
The Power Related Review Source Sensor Map values are:
Menu path: Main/Review SS Map]
Source FS Voltage Scaling PoWeR* 2.5/5/10 Full Scale VOLTS
⇐
see Power Supply input requirement
Source Max PoWeR 0.0 – 100.0%
Source Analog Output CHaNneL 2 Channels (select 1 only)
The Power Related Service Menu values are:
Menu path: Main/Service]
(Memory Contents) as is (no modification), purged, factory (defaults) [see section 3.21 ]
note film parameter changes
(Reset) Arm reset, reset armed [Provide a product reset when back panel power
SECTION 2.XX page 42 of 292