INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual
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STC-2000A DEPOSITION CONTROLLER
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Note
[NOTE: The text ACTIVE will also appear on the second line and designate which Film is active. This same value is displayed on
the Run Time screen as USE FILM #.]
To complete the programming of our 6 layer, 2 film test process, program the following
parameters of Film 3.
SOAK 1 PWR VALUE to
20.0 %
PWR RAMP 1 TIME
to
0:10
PWR SOAK 1 TIME
to
0:10
SOAK 2 PWR VALUE to
25.0 %
PWR RAMP 2 TIME
to
0:05
PWR SOAK 2 TIME
to
0:05
DEPOSIT RATE
to
30.0 A/s
MAX PWR LIM
to
100.0%
PLOT VERT SCL V
to
10
Selecting The Active Process
Referring to Figure 2.6, notice that the STC-2000A recipe storage is divided into Film Recipes and
Process Recipes. In order to start an automatic deposition process, the user must program the desired
information into the recipe storage area, and then select one of the nine available processes, one of which is
the current ‘active’ process. Active does not refer to the operational state (running or idle) of the process
but refers to it being the default process, which is used when a deposition is activated (started). Each of the
nine process recipes (identified by numbers 1 through 9) can have from 0 to 99 layers (steps) in length,
with each layer referencing one of the nine available film programs. Processes of 0 layers (END only),
quite obviously, are not runable. Starting such a process will result in an error indicating an ERROR IN
RECIPE. Prior to activating an automatic deposition sequence the user must insure that the particular user
defined process recipe has been selected as the ‘ACTIVE PROCESS’. The current or active process
number (1 through 9) is displayed in the middle left hand area of the runtime screen (see figures 2.2, 2.4,
2.13), following the label: 'PROC’.
The current layer number, if any, is displayed as well as the status of the process (i.e. PROCESS
VERIFY, PROCESS STOP, PROCESS RESETING, PROCESS BUSY, PROCESS WAITING or
ERROR). The active process can be changed providing the status is displayed as LAYER # rather than
LAYER NN where NN is 1 through 99. The # is equivalent to a zero and indicates an illegitimate run
value.
To change the active process (only allowed when the instrument is in IDLE and the LAYER value
is "#" indicating an at rest condition [observe the runtime screen]), press the fixed MENU key, which will
produce the MAIN menu screen as shown in figure 2.5. Next, press the digit key area that is labeled on the
MAIN menu as the ‘ACTIVE PROCESS’ selection. Only the numeric digit is an active key. The box
with the text ‘ACTIVE PROCESS’ is only a label for the numeric digit (see figure 2.12). Pressing the
numeric digit key increments the value with each press such that ‘1’ through ‘9’ can be entered to select the
active process. Press the fixed STATUS key to return to the Run Time screen. If an attempt to change the
active process is made with the instrument in a non-idle condition, a temporary error message will appear
saying ; “INHIBITED: UNIT MUST BE IDLED”. When the text "NA" appears on the digit key, the
product is not allowing the alteration because it would not be desirable to change the process while it is
running. The process must be stopped. See START: Reset/Start Process diagram below. See section 2.19.
SECTION 3.XX
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