INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 240)

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STC-2000A DEPOSITION CONTROLLER
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83 RSYNC_PG
3
Pocket good, gun3.
84 RSYNC_PG
4
Pocket good, gun4.
85 RSYNC_PG
5
Pocket good, gun5.
86 RSYNC_PG
6
Pocket good, gun6.
87 RSYNC_PG
7
Pocket good, gun7.
88 RSYNC_PG
8
Pocket good, gun8.
89 REVERIFY Trigger a request for MEAS to re-scan map matrix
90 ZROTK_SS
1
Thickness zero, chnl1.
91 ZROTK_SS
2
Thickness zero, chnl2.
92 ZROTK_SS
3
Thickness zero, chnl3.
93 ZROTK_SS
4
Thickness zero, chnl4.
94 ZROTK_SS
5
Thickness zero, chnl5.
95 ZROTK_SS
6
Thickness zero, chnl6.
96 ZROTK_SS
7
Thickness zero, chnl7.
97 ZROTK_SS
8
Thickness zero, chnl8.
98 CNCLPR_S
S1
Reset output power, gun1.
99 CNCLPR_S
S2
Reset output power, gun2.
100 CNCLPR_S
S3
Reset output power, gun3.
101 CNCLPR_S
S4
Reset output power, gun4.
102 CNCLPR_S
S5
Reset output power, gun5.
103 CNCLPR_S
S6
Reset output power, gun6.
104 CNCLPR_S
S7
Reset output power, gun7.
105 CNCLPR_S
S8
Reset output power, gun8.
106 FAILSCL_
CHL1
Fail sensor channel, chnl1.
107 FAILSCL_
CHL2
Fail sensor channel, chnl2.
108 FAILSCL_
CHL3
N.A.
109 FAILSCL_
CHL4
N.A.
110 FAILSCL_
CHL5
N.A.
SECTION 6.XX page 240 of 292