INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual
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STC-2000A DEPOSITION CONTROLLER
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Used to stop the deposition process in non-sequencing mode. Non-sequencing mode does
not use a process program but rather a film, which is invoked by making it the next active
film and pressing the START key sequence to begin the deposition process. It has,
therefore, one implicit process. The Final Thickness Limit Trigger stops the selected film
deposition when the thickness reaches this user entered thickness value. This value is
analgous to the thickness value in a process program when in sequencing mode.
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Parameter 8
Setpoint Time Lim
it
access:
SPTM
Value Range
0:00 - 99:59
Units
Min:Sec
The setpoint time limit parameter is used to provide a comparison point for the STC-
2000A timer setpoint event status.
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Parameter 9
Soak 1 P
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r Value
access:
PWR1 power condition power level 1
Value Range
0.0 - 100.0
Units
Percent
This parameter sets the deposition source power value to be used as the first level of soak
power in the pre-deposition cycle. This power level will be maintained for the duration of
the soak 1 timer. This level is typically used to out gas and condition the source material.
A value of 0.0% causes the rise/soak 1 phase to be skipped.
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Parameter 10
P
o
w
e
r Ramp 1 Time
access:
RMP1 ramp time to power level 1
Value Range
0:00 - 99:59
Units
Min:Sec
This parameter sets the duration of the power ramp from zero power to the power level
set by the soak 1 power value parameter.
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Parameter 11
P
o
w
e
r Soak 1 Time
access:
SKT1 soak time at power level 1
Value Range
0:00 - 99:59
Units
Min:Sec
This parameter sets the time that the source will remain at the soak 1 power level
following the completion of the ramp to this level.
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Parameter 12
Soak 2 P
o
w
e
r Value
access:
PWR2 power condition power level 2
Value Range
0.0 - 100.0
Units
Percent
This parameter sets the deposition source power value to be used as the second level of
soak power in the pre-deposition cycle. This power level will be maintained for the
duration of the soak 2 timer. A value of 0.0% skips the rise/soak 2 phases.
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Parameter 13
P
o
w
e
r Ramp 2 Time
access:
RMP2 ramp time to power level 2
Value Range
0:00 - 99:59
Units
Min:Sec
SECTION 6.XX
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