INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 90)

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STC-2000A DEPOSITION CONTROLLER
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Mode Choice: DELETE
DELETE removes a step from the process program list (key legend is DEL) indicated by the
cursor.
The mode for a step or layer can be edited while the process is running if the change is not on the
active layer or the change does not alter the length of the process list. (END, INSERT, and DELETE
generally changes the list length).
FILM# key legend is: FLM.
MODE key legend is: MOD.
THICK key legend is: THK.
ENTER key legend is: ENT.
After the mode is entered, the FILM# key (FLM) can be pressed. (Note that the MODE, FILM#
and THICK keys can be pressed in any order.) After pressing the FILM# key, one of the ninety-nine stored
films can be selected by pressing the digit key[s] followed by the ENTER key (ENT). This associates a
layer or step in a process with a film program. The film program stores the material related parameters and
calls out a sensor map that contains source, tooling and crystal related parameters . The same film can be
assigned to multiple steps within a process. After entering the film number, the THICK key (THK) can be
pressed. The desired final thickness for that layer is entered/edited by pressing the necessary digit keys
followed by the ENTer key. The number is built by shifting in digits from right to left and can continue
indefinitely until either ENTer or BAK is pressed. This allows entry correction by repeating the number
sequence until correct.
While constructing/editing the elements of a line (MODE, FILM#, THICKNESS), an edit line will
appear at the bottom of the LCD screen to indicate that an edit is in progress. The edit line consists of a
prompt naming the edit type followed by the value being entered. The edit can either be accepted by
pressing ENTer or abandoned by pressing BAK.
Additional steps can be added to the process by repeating the above procedure. A step or steps can
be added to an existing process by positioning the cursor (>) at the step where the new step will be inserted.
The new line will be inserted after the line with the cursor. The former line step occupant and all
subsequent line steps are advanced in their list positions as the new step is added. Press the INSert key and
then a new step will be inserted. When this is done, the default parameters of SKIP, film 1, and thickness
0.000 are entered for the inserted layer. These can then be edited to the desired values.
In multi-layer deposition the same deposition material and source combination are sometimes used
in different film programs. Generally at least two film programs are associated with one material source
combination. One of the film programs contains source parameters (rise and soak time and power levels)
for the initial conditioning of the source or first layer or material usage, the other film program parameters
would be for subsequent layers of the same material.
SECTION 3.XX page 90 of 292