INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual
Page 270
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STC-2000A DEPOSITION CONTROLLER
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Material
Symbol
Bulk Density
Z Factor
gm/cc
Indium Intimonide
InSb
5.76
0.769
Indium Oxide
In2O3
7.18
--------
Iridium Ir
22.4
0.129
Iron Fe
7.86
0.349
Lanthanum La
6.17
0.920
Lanthanum Fluoride
LaF3
5.94
--------
Lanthanum Oxide
LaO3
6.51
--------
Lead Pb
11.3
1.130
Lead Sulfide
PbS
7.50
0.566
Lithium Li
0.53
5.900
Lithium Fluoride
LiF
2.64
0.774
Magnesium Mg
1.74
1.610
Magnesium Fluoride
MgF2
3.00
--------
Magnesium Oxide
MgO
3.58
0.411
Manganese Mn
7.20
0.377
Manganese (II) Sulfide
MnS
3.99
0.940
Mercury Hg
13.46
0.740
Indium Intimonide
Through Terbium
Molybdenum Mo
10.2
0.257
Neodynium Fluoride
NdF3
6.506
--------
Neodynium Oxide
Nd2O3
7.24
--------
Nickel Ni
8.91
0.331
Niobium Nb
8.57
0.493
Niobium (V) Oxide
Nb2O5
4.47
--------
Palladium Pd
12.0
0.357
Platinum Pt
21.4
0.245
Potasium Chloride
KCl
1.98
2.050
Rhenium Re
21.04
0.150
Rhodium Rh
12.41
0.210
Rubidium Rb
1.53
2.540
Samarium Sm
7.54
0.890
Scandium Sc
3.00
0.910
Selenium Se
4.82
0.864
Silicon Si
2.32
0.712
Silicon (II) Oxide
SiO
2.13
0.870
Silicon Dioxide
SiO2
2.20
1.070
Silver Ag
10.5
0.529
Silver Bromide
AgBr
6.47
1.180
Silver Chloride
AgCl
5.56
1.320
Sodium Na
0.97
4.800
Sodium Chloride
NaCl
2.17
1.570
Sulfur S
2.07
2.290
Tantalum Ta
16.6
0.262
Tantalum (IV) Oxide
Ta2O5
8.20
0.300
Tellurium Te
6.25
0.900
Terbium Tb
8.27
0.660
Table 7.1: Material Reference Table. Continued.
SECTION 7.XX
page 270 of 292