INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 190)

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STC-2000A DEPOSITION CONTROLLER
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operating in the NON-sequencing mode, of starting the currently selected ActiveFilm. In this way
a stopped unit will start a film up whether at an idle resting state or stopped in an error condition,
without the possible need for multiple starts as would be needed from the front panel (STOP to
READY, then READY to Running Film). If the unit is in the Sequencing mode, the resource 202
is treated as a softnode, rather than as an event, and triggering it will cause the softnode behavior
at 202 (a one-second TRUE state which reverts back to FALSE). This re-mapping of unused
events between sequencing and non-sequencing modes insures that a working program for one
mode will not produce a syntax error if the mode of the instrument is changed. That is because a
softnode has universal usage (In/Out/Trip/Set/Clear/etc.) and if legal in the intended mode
(sequencing or non-sequencing), it will still be legal ,although non-functional, in the alternate
mode. It is NOT recommended, however, to use the alternative function softnode as a softnode
intentionally. Under such conditions a program could be written which uses other than the T (trip)
token, and then if the unit is alterred to from a sequencing to a non-sequencing unit, or vice versa,
the I/O program would be a syntactically invalid program. This rung is included in this program
so the program is generic and works when in non-sequencing mode. The transition of the input
from FALSE to TRUE creates the edge which triggers the event. Continued persistence in the
TRUE state does nothing, and the signal must go FALSE long enough to be sensed FALSE
(minimally 1/4 second to be sure), before going TRUE again can cause another Active film start.
Only a film at rest can respond to the film start. Film starts which occur while a film is already
running are ignored, not queued up. Once the film stops, the next occurring new trigger of a start
event causes the film to restart.
Rung 009: This rung connects (logically, cause and effect wise) the external input 2 (I1) to event 200, the
abort/stop event. This event is the same event which is used by all internal systems logic to stop
the running film/processes, and will have the same behavior. The uniqueness of this stop is that,
along with a computer communications caused stop, it will display STOP: REMOTE on screen,
and the stop type (resource #73) will be a value of 3. The transition of the input from FALSE to
TRUE creates the edge which triggers the event. Continued persistence in the TRUE state does
nothing, and the signal must go FALSE long enough to be sensed FALSE (minimally 1/4 second
to be sure), before going TRUE again can cause another STOP. Only an actively running film can
respond to the STOP. Film stops which occur while a film is already stopped are ignored, not
queued up, since the automatic process is already stopped. Once the film is running, the next
occurring new trigger of a stop event causes the running film to abort/stop.
Rung 010: This rung connects (logically, cause and effect wise) the external input 3 (I2) to event 217, the
final thickness trigger event. When the change of input edge event of the external input 3 occurs, it
triggers the final thickness trigger event. This event is used in the process automation logic to
terminate a deposit phase (deposit, rate-ramp, post rate ramp deposit, time power, etc). It is
automatically generated internally when the measured accumulated thickness exceeds the final
thickness as programmed in the film (for non-sequencing) or process (for sequencing). By
triggering the same event remotely, the deposition ends (prematurely) and the film enters the post
deposit idle phases and eventually terminates. To use this, the external termination signal from
some other form of endpoint determination (optical monitor, resistance monitor, etc..) is wired into
this input, and the film or process layer thickness is set to a high value such that the measured
accumulated thickness would not normally trip the final thickness event. Then when the external
system determines sufficient coating has occurred, it triggers the event via a hardware input signal
long enough to be seen and coupled into the processing.
Rung 011: This rung connects (logically, cause and effect wise) the external input 4 (I3) to event 219, the
zero substrate thickness event. When the change of input edge event of the external input 4 occurs,
it triggers a zero thickness event which is the same one that is used to zero thickness when the
front panel button is pressed. In this way the accumulated thickness value can be reset to zero from
a remote input.
Rung 012: This rung connects (logically, cause and effect wise) the user definable front panel function key
F1 (leftmost membrane switch under the yellow user-LEDs) (I68) to the leftmost yellow user LED
SECTION 5.XX page 190 of 292