INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 216)

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STC-2000A DEPOSITION CONTROLLER
y
Read or set the process number that is currently active. The set command is inhibited if a process is
running.
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Parameter 3
Process Run Number
access value: RUNNO run number
Value Range 0 To 9999
Units None
Read or set the run number. The set command is inhibited if a film is running.
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Parameter 4
Password Lock # - Parameters And Executive
access value: LOCKN param & exec lock number
Value Range 0 To 9999
Units None
This allows certain areas of the STC-2000A to be restricted to those people knowing the password code. If
this is programmed with a non-zero value the value enables the password function and is itself the
password. Whenever accessing a menu that can change a parameter, the STC-2000A will ask for the
password.
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Parameter 5
Password Lock # - I/O And Communications
access value: COMLOK I/O and communications lock code
Value Range 0 To 9999
Units None
This allows certain areas of the STC-2000A to be restricted to those people knowing the password code. If
this is programmed with a non-zero value the value enables the password function and is itself the
password. Whenever accessing a menu that can change an I/O programming parameter or a
communications parameter, the STC-2000A will ask for the password.
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Parameter 6
NA access value: OBSO Was control loop polarity
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Parameter 7
Control F.S. Volt Control Loop Full Scale Voltage
access value: OBSO Was control loop full scale volts choice
Value Range 0 , 1 or 2
Units 0 = 2 Volts, 1 = 5 Volts, 2 = 10 Volts
This scales the control voltage of the STC-2000A to match your power supply. While most supplies are set
to -10 volts for full power, not all are. This allows 100% power from the STC-2000A to be either 2, 5, or
10 volts.
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Parameter 8
Rate Direction
access value: OBSO Was rate direction, positive, negative
Value Range 0,1
Units 0 = Positive, 1 = Negative
This parameter sets the STC-2000A for either a deposit mode (positive) or an etch mode (negative).
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Parameter 9
Recorder Function
access value: ARFNC analog recorder function select, ARFC_class RATE/RDEV/PWRL THIK/REMOTE/IOACC/NONE
Value Range 0 To 6
Units 0= Rate, 1= Rate Deviation, 2= Power, 3= Thickness, 4= Computer Remote, 5=I/O Control, 6=Off
SECTION 6.XX page 216 of 292