INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 57)

p
STC-2000A DEPOSITION CONTROLLER
y
If manual mode is entered while in the rise, soak or deposit phases of a deposition, the following arrow key
additions will appear on the 2
nd STATUS screen. They can be pressed to change the power% value. The Up
arrow increases power. The Down arrow decreases power. If the pendant is connected, pendant arrow keys
can be used in conjunction with the LCD arrow keys. If an LCD arrow key and a pendant arrow key are
held depressed simultaneously, the last key pressed and held gets the attention.
[Manual mode can be entered by
pressing the fixed front panel MANUAL key while in rise, soak or deposit phases of a deposition.]
The ZERO POWER key is used to zero the power on non-active source outputs only. It has no effect on the
active source output. Pressing the key (box) labeled ZERO POWER brings forth a key to the right of it that
can have 3 possibilities: ZERO CHannel 1, ZERO CHannel 2 and ZERO ALL. After the 3
rd key label in the
sequence, the area to the right of the zero power key reverts to blank. The ZERO POWER key is used to
select the desired function and the key to the right, which indicates the function, is pressed to make the
selection.
The ZERO THICK key is used for diagnostics and tooling set up only. It has no effect on the deposition
thickness as seen on the LCD display. What is zeroed is the raw value that comes from the sensor card. For
either FORCE FAIL or ZERO THICK selector keys, the selections appear to the right in the form of a key,
that when pressed, will effect the named channel[s] with that function. Also, in either case, pressing the key
labeled FORCE FAIL or ZERO THICK brings forth the key to the right. The ZERO THICK key yields 3
possibilities: ZERO CHannel 1, ZERO CHannel 2 and ZERO ALL. FAIL CHannel 1, FAIL CHannel 2,
FAIL ALL and RE-VERIFY are generated by pressing the FORCE FAIL key. The FORCE FAIL key
yields 4 possibilities: FAIL CHannel 1, FAIL CHannel 2, FAIL ALL and RE-VERIFY. The FORCE FAIL
function can fail any crystal, including the active crystal[s]. When a crystal is failed, the system will look
for a backup crystal or crystals. To re-evaluate/reinstate a failed crystal sensor, by force fail key or
otherwise, the RE-VERIFY key is used. The RE-VERIFY key checks all potentially active crystals and re-
verifies their status as good or bad. This is useful when a nearly loaded crystal is replaced as in the
following example scenario.
SECTION 3.XX page 57 of 292