INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual

Page 144

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STC-2000A DEPOSITION CONTROLLER

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Water Line Caution:

Caution



CAUTION

Ensure that the water lines are clear of obstructions before operating the

sensor above room temperature. A water flow rate of 0.2 to 0.3 gpm is adequate for most
applications.


Electrical In-Vacuum Cable

Vacuum Electrical Connections

The electrical cable from the sensor head to the vacuum feedthrough should be wrapped around

the water lines using up all excess length in the process. Firmly tighten the connectors at both the sensor
and feedthrough ends. The water lines and sensor cable should then be wrapped with clean tin foil or other
shielding material to prevent evaporant build-up and also to aid cable cooling and mechanical stability.

The sensor head must always be operated at "ground" potential and this connection is carried

through the sensor feedthrough coaxial connectors and shields. The remote oscillator is attached to the
vacuum feedthrough via the six-inch male/female coax cable. The long coax cable connects the remote
oscillator to the display unit. This cable must be a coaxial 50-ohm type and can be up to 100 feet in length.

For safety purposes and electrical noise immunity, a ground wire should always be installed

between the vacuum vessel and earth ground. Refer to Figure 4.3.


Dual Shuttered Head

The installation of a dual shuttered sensing head is similar to that of the single head. A

second sensing input (Sensor 2) is used for the second crystal channel. If the STC-2000A is
configured in the executive mode for automatic crystal switching the XTAL 2 SELECT output
performs the necessary functions for controlling the shutter of the dual sensor. Proper phasing
between the sensor inputs and shutter control can easily be checked by installing a sensing
crystal in only sensor 1 and observing the good and "failed" (absent) sensing crystal when
switching manually between sensor 1 (good) and sensor 2 (failed).


SECTION 4.XX

page 144 of 292

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