INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 45)

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STC-2000A DEPOSITION CONTROLLER
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Review SS Map values after purge:
Source Sensor Full Power Volts 10 volts
Source Sensor Max Power Value 0.0%
Source Sensor Analog Output Chnl 1 (Channel Select)
Master Tooling Value
100.0%
Minimum Start Xtal Channels 1 channel
Minimum Backup Xtal Channels 0 channels
Minumum Active Xtal Channels
1 channel
Xtal Channel Drop Filter NONE
Indexer Synchronization Mode NONE
Indexer Synchronization Time 2 seconds
Channel 1 Start Mode OFF
Channel 1 Fail Action Mode NONE
Channel 1 Backup List 0
Channel 1 Tooling Value 100.0%
Channel 1 Weight 100.0%
Channel 2 Start Mode OFF
Channel 2 Fail Action Mode NONE
Channel 2 Backup List 0
Channel 2 Tooling Value 100.0%
Channel 2 Weight 100.0%
I/O SETUP values /programs after PURGE:
I/O Programs A & B Cleared
Memory Menu A
Operate Menu Running
Film parameter differences: factory restore has: max power limit set to 50% (purge = 0%).
Processes Step differences: As an example, the following is the difference between a factory setting and a
purged setting for PROCESS# 3. The factory setting has, for the first and only step (step 01):
MODE=AUTO, FILM#=3, and THICK(Kå)=0.300. The purged setting has an END line as the first and
only step (considered cleared). If process 3 were run with factory settings, AUTO mode would be invoked
using film #3 and running until a final thickness of .300 Kå was achieved.
If process 3 were run with purged settings, the END command would be encountered immediately thus
stopping the process. The table below shows this information as well as information for the other
processes.
Factory Settings table for All Process Numbers:
Proc# 1 Proc#2 Proc#3 Proc# 4 Proc#5 Proc#6 Proc#7 Proc#8 Proc#9
STEP 01 01 01 01 01 01 01 01 01
MODE AUTO AUTO AUTO AUTO AUTO AUTO AUTO AUTO AUTO
FILM#
1 2 3 4 5 6 7 8 9
THICK 0.100 0.200 0.300 0.400 0.500 0.600 0.700 0.800 0.900
All factory Processes have END as STEP 02.
I/O programs are not factory restored because of the danger involved. Factory restore will not, therefore,
clear or restore the factory I/O program[s] (it leaves them unchanged). Purge will, however, clear I/O
programs. These selections will cause the unit to REBOOT with the new configuration in effect. The
section describing the SERVICE menu will describe these elements in detail. As seen in the above lists,
there are groups of settings (Film parameters, System configuration, Communications, Processes, I/O
SECTION 2.XX page 45 of 292