Stc-2000a deposition controller – INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual

Page 61

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STC-2000A DEPOSITION CONTROLLER

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Flow chart depicting the steps of a START process.























VERIFY
XTAL

WAIT
CHECK

BUSY
Proc

ERROR

REST




STOP

1

st

RESET/START

PROC

2

nd

RESET/START PROC

3

rd

RESET/START PROC

LAYER = #









First press of START key + RESET/START PROC key:

to REST location.

Second press of START key + RESET/START PROC key:

to STOP location.

Third press of START key + RESET/START PROC key: to VERIFY CRYSTAL location.



This sequence was presented to help provide an understanding of a start. Other sequences are possible.

SECTION 3.XX

page 61 of 292

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