INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 254)

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STC-2000A DEPOSITION CONTROLLER
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(U) - Reads Number Of Steps (00 ...99) In A Given Process (1.....9)
(V) - Reads Process Step Memory Storage Still Available
Process Sequencing - Process Size Memory(U,V)
The U command requests a readback of the number of steps in use in the designated process recipe (as per
the parameter 1..9). A recipe with only the END layer present uses zero (0) steps.
The V command requests a readback of number of process steps storage still available for use in the STC-
2000A instrument. There is a capacity within the instrument for a total of 250 process steps, which may be
assigned from 0 to 99 to a process recipe. For example, nine processes each having 27 steps in each would
use up 243 steps, leaving a remainder of 7 available. This is the value (7) returned by this query. Any
process which has fewer than 99 steps may be extended with more steps providing there is memory
available (as indicated by the return of this command). Deletion of steps of some other process may be
necessary to free up steps should no steps be available to extend the process which needs extension.
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Command: U
Mnemonic:
EXCT_plenth (Process Length)
Parameters: [1..9] corresponding to process recipe programs 1..9.
Description: Requests a readback of the number of steps in the designated process recipe.
Returns:
[RZCD_AOK][0..99] if proper process # (1..9) was sent.
[RZCD_ILCD] if unit is non-sequencing instrument.
[RZCD_ILDV] if improper value for parameter argument.
[RZCD_ILSN] if too many arguments, wrong delimiters, etc..
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Command: V
Mnemonic:
EXCT_pavail (Process steps available)
Parameters: None
Description:
Request readback of number of process steps storage still available for use in STC-2000A
instrument. There is capacity within the instrument for a total of 250 process steps, which may be
assigned from 0 to 99 to a process recipe. Nine processes each having 27 steps each would use up
243 steps, leaving a remainder of 7 available. This is the value returned by this query. Any process
which has fewer than 99 steps may be extended with more steps providing there is memory
available (as indicated by the return of this command). Deletion of steps of some other process
may be necessary to free up steps should no steps be available to extend the process which needs
extension.
Returns:
[RZCD_AOK][0..250] indicating the number of available process steps left to be assigned to a
process recipe.
[RZCD_ILCD] if unit is non-sequencing instrument.
[RZCD_ILSN] if too many arguments, wrong delimiters, etc..
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Command Examples
Command U2
Response A17
Description
Query of process 2 indicates 17 layers of a possible 99 are programmed.
Command V
Response A250
SECTION 6.XX page 254 of 292