INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 26)

p
STC-2000A DEPOSITION CONTROLLER
y
NON-SEQ MODE
In terms of STC-2000A usage, the simplest configurations would be either in sequencing mode with: 1
crystal, 1 oscillator, 1 process, 1 film, 1 material, and 1 deposit or in non-sequencing mode with: 1 crystal,
1 oscillator, 1 film, 1 material, and 1 deposit. Also for these simplest configurations, in either sequencing
or non-sequencing mode, a single sensor input would be employed along with a single control voltage
output (controls power to that which is generating the evaporant). The simplest means of evaporant stream
generation would be resistive heating.
In terms of unit hardware, this translates into an STC-2000A with its single 2 channel sensor card,
1 output card and 1 input card.
In terms of unit software (menu programming), a specific film is either called by a process (in
sequencing mode) or called directly (in non-sequencing mode). The film, in turn, calls out a specific sensor
map. Only 1 process, only 1 film, only 1 map can be active (running) at a single point in time. A process
can call a different film at each of its steps (or layers) up to 99 steps.
SEQ MODE
1 implicit active process
(user selects 1 active film)
1 active process
(process selects 1 or more films)
Up to 9 programmable processes
1 ACTIVE FILM
(up to 50 programmable films)
Film parameters define the
constituent elements of the
deposition
SECTION 2.XX page 26 of 292