INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 86)

p
STC-2000A DEPOSITION CONTROLLER
y
This parameter provides the time value when the map parameter Indexer Synchronization Mode is
set to DELAY. The indexer allowed a predetermined pocket search time. This is a parameter with global
scope.
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Parameter
CHANNEL x START MODE [where x = 1 or 2]
Channel Start Mode: Off, Active, Standby
Units None
Channel x Start Mode
This indicates which of the crystal sensor channels will be active when a deposition run starts.
Unless the crystal fails, or an I/O program processing event causes a configuration change, this crystal state
will remain in effect throughout the process.
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Parameter
CHANNEL x FAIL ACTION [where x = 1 or 2]
Channel Fail Action: None, Abort Film
Units None
Channel x Fail Action
This indicates what will occur when a channel fails for whatever reason. NONE provides no fail
action. Abort Film provides a film abort when a failure occurs on this channel.
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Parameter
CHANNEL x BACKUP LIST [where x = 1 or 2]
Channel Backup List: Z – ZZ (1 item list or 2 item list)
[where Z = 1 to 2 (in each position w/o redundancies, list extends to 0-2 for a 1 item list)]
Units None
Channel x Fail Action
This parameter provides a list of potential backup crystal sensors should this channel fail for
whatever reason. The crystal sensor channel switching is automatic when there is a sensor failure.
Thickness and rate control is maintained during the switching operation. Also, for those multiple material
depositions requiring extreme accuracy of measurement that mixing of materials on one sensor could
degrade, it is possible to use a specific sensor for each material type.
Example backup lists:
comments:
0 (zero) no backups are defined
2 channel 2 is the one and only backup channel
21 backup channels are 2 then 1
11 incorrect list: 1 is repeated
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Parameter
CHANNEL x TOOLING [where x = any of 1 or 2]
Tooling Value: RANGE IS 10.0 - 400.0
Units Percent
Channel x Tooling
This TOOLING parameter is used in conjunction with the MASTER TOOLING parameter as a
correction factor to compensate for geometric position differences between the location of the sensor and
the target substrate. Both of the 2 possible sensors have their own tooling factor. If no correction is
required, both the substrate and sensor see the material source in an identical manner and the Tooling
Parameter is set to 100%. Generally, if the sensor is farther from the source than the substrate, the tooling
will be set to >100%. If the sensor is closer to the source, the tooling will be set to < 100%. See Section 4.2
for calibration information.
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Parameter
CHANNEL x WEIGHT [where x = 1 or 2]
Weight Value: RANGE IS 10.0 - 400.0
Units Percent
Channel x Weight
This parameter is used during a multi-sensor averaging process. Programming 2 crystal sensor
channels as active automatically invokes an averaging mode. Weight provides the user with a method to
assign each of the sensors a contribution percentage of the total used to determine thickness. When not in
averaging mode, this parameter has no effect.
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SECTION 3.XX page 86 of 292