INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual

Page 52

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STC-2000A DEPOSITION CONTROLLER

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SECTION 2.XX

page 52 of 292

2000A. Once this is known, the system user need only run (or setup) their process until specific needs
become apparent. With a specific need in mind, a perusal of the Event and State ID List (Table 5.3) will
match your need to one or more of the many possible solutions within the expansive repertoire of the STC-
2000A.

There has also been provided some example I/O programming segments with accompanying

explanations in section 5. These can be used to construct larger programs that fulfill the overall process
goal. Included with the STC-2000A is a CD containing communications programs that allow the
construction of I/O programs on a P.C. Writing I/O programs in this way is further enhanced as comments
can be added using a comma as a delimiter and not having to use line numbers. The Windows® program
running on the P.C. will strip the comma and all that follows on each line and add the line numbers as the
I/O program is downloaded into the STC-2000A. I/O programs constructed on the STC-2000A may also
be uploaded to a P.C. using the same communication program. The following is an example of such a
program constructed on a P.C. and from the P.C. view (this example [w/ checksum of 41779] is repeated
with an explanation in a later chapter).

I73 #2 = S8,

Stopped Xtal bad sets relay 1 slot 2.

I228 C8,

Begin Job/Film Event, clears relay 1 slot 2.

I79 #1 = O9,

Source 1 shutter connects to relay 2 slot 2.

I81 #2 & O10,

Sensor 2 shutter connects to relay 3 slot 2.

I221 S11,

Setpoint thickness trigger sets relay 4 slot 2.

I228 C11,

Begin Job/Film Event, clears relay 4 slot 2.

I0 T216,

Input 1 slot 1 is start unconditional.

I0 T202,

I1 T200,

Input 2 slot 1 is stop.

I2 T217,

Input 3 slot 1 is final thickness trigger input.

I3 T219,

Input 4 slot 1 is zero substrate thickness trigger.

I68 O64,

Input function key 1 to front panel LED 1.



unning a deposition

test mode (introduce concept of, defer desc., user can test drive w/o danger)

run time mode: (concept of, text details only, implementation/screens deferred)

m2.2)

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